micromachining
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Micromachining — may refer to: Superfinishing, a metalworking process for producing very fine surface finishes Various microelectromechanical systems Bulk micromachining Surface micromachining High aspect ratio microstructure technologies See also High aspect… … Wikipedia
micromachining — Micromachining Микрообработка Технология для изготовления микроэлектромеханических систем … Толковый англо-русский словарь по нанотехнологии. - М.
micromachining — ˌ noun ( s) Etymology: micr + machining, gerund of machine (II) : the removing (as in drilling, planing, or shaping) of small amounts of material (as metal) by action other than that of a sharp edged tool … Useful english dictionary
micromachining — mikroapdirbimas statusas T sritis radioelektronika atitikmenys: angl. micromachining vok. Mikrobearbeitung, f rus. микрообработка, f pranc. microtraitement, m … Radioelektronikos terminų žodynas
micromachining — mi·cro·machining … English syllables
Surface micromachining — is a process used to produce micromachinery or MEMS.Unlike Bulk micromachining, where a silicon substrate (wafer) is selectively etched to produce structures, surface micromachining is based on the deposition and etching of different structural… … Wikipedia
Bulk micromachining — is a process used to produce micromachinery or microelectromechanical systems (MEMS).Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively… … Wikipedia
mechanical micromachining — mechaninis mikroapdirbimas statusas T sritis radioelektronika atitikmenys: angl. mechanical micromachining vok. mechanische Mikrobearbeitung, f rus. механическая микрообработка, f pranc. microtraitement mécanique, m … Radioelektronikos terminų žodynas
микрообработка — Micromachining Микрообработка Технология для изготовления микроэлектромеханических систем … Толковый англо-русский словарь по нанотехнологии. - М.
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
